SURFACE MORPHOLOGY OF SPUTTERED TITANIUM-ALUMINUM-NITRIDE COATINGS

Author(s): Esmar Budi, M. Mohd. Razali, A.R. Md. Nizam,

Date: Apr 30, 2020

Source: SPEKTRA: Jurnal Fisika dan Aplikasinya

Publisher: Fisika Universitas Negeri Jakarta, Universitas Negeri Jakarta

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