Micro cantilever beam fabrication and characterization
Abstract
Cantilever beam has become a ubiquitous structure which is utilized in many microelectromechanical systems (MEMs). For instance, piezoelectric cantilever beams are mounted into pressure sensors produced by Memscap or widely used in MEMs generators harvesting energy from vibration. In this paper, cantilever beams are designed and fabricated on silicon wafers. L-Edit software is used to design two masks for light exposure step. Fabrication process including photolithography, copper thermal evaporation, and etching is done to achieve the designed cantilever beams. The thickness of each layer is measured after each step to investigate the height of the cantilevers to the substrate. All lab work and accomplished results, in this report, will be represented in detail.
Moraref